New Approaches to Image Processing Based Failure Analysis of Nano‎-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non‎-metallic microstructures‎.‎ Engineers and scientists face the pressing problem in ULSI development and quality assurance‎:‎ microscopy methods can‎'‎t keep pace with the continuous shrinking of feature size in microelectronics‎.‎ Nanometer scale sizes are below the resolution of light‎,‎ and imaging these features is nearly impossible even with electron microscopes‎,‎ due to image noise‎.‎ This book presents novel ‎"‎smart‎"‎ image processing methods‎,‎ applications‎,‎ and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization‎.‎ It explains an approach for high‎-resolution imaging of advanced metallization for micro‎- and nanoelectronics‎.‎ This approach obviates the time‎-consuming preparation and selection of microscope measurement and sample conditions‎,‎ enabling not only better electron‎-microscopic resolution‎,‎ but also more efficient testing and quality control‎.‎ This in turn leads to productivity gains in design and development of nano‎-scale ULSI chips‎.‎ The authors also present several approaches for super‎-resolving low‎-resolution images to improve failure analysis of microelectronic chips‎.‎

• Author‎:‎ Zeev Zalevsky‎,‎ Pavel Livshits‎,‎ Eran Gur
• Publisher‎:‎ Elsevier
• ISBN‎:‎ 9780323241434